| < DIFFUSION TEL > | ||
| Description | Part Number | Qty |
| BUSHING SLIDE(SMS20) | 018-000060-1 | 2 |
| BELT FOR HANDLER 805 | 0230005281 | 5 |
| BELT FOR HANDLER 805 | 0230005291 | 4 |
| BELT TIMING(150L-0520A-L) | 023-000306-1 | 11 |
| SPRING(1138) | 0251004761 | 6 |
| SENSOR PART E39-RSA REFLECTOR | 036-000333 | 50 |
| CONNECTOR SQUARE(DA-15P) | 030-005006-1 | 15 |
| CONNECTOR(220-U-6-0-F) | 0280027251 | 4 |
| DC POWER SUPPLY(K50A-5N) | 039-505713-1 | 1 |
| DC POWER SUPPLY(P100E-24N) | 039-000713-1 | 1 |
| DC POWER SUPPLY(YW1515) | 039-000818-1 | 1 |
| POWER SUPPLY (CT.5W-15-XTRS) | 0390005111 | 3 |
| POWER SUPPLY | 0392150401 | 1 |
| SWITCH MICRO(TZ-1GV22) | 036-000464-1 | 5 |
| SWITCH PROXIMITY | 036-100356-1 | 1 |
| O-RING VITON | 027-000208-1 | 458 |
| AIR CYS CJ2B16-E466-60 | 024-002878-1 | 10 |
| TEFLON JOINT(220-RU-10-6-F) | 0280027151 | 4 |
| AEC 2200 CONTROL BOARD (80-2010) | 1181-0001711-1 | 3 |
| BOARD MC-2091C | 1181-000148-13 | 7 |
| BOARD | 1181-000173-11 (14) | 4 |
| MEMORY CARD BE512NI BOARD | 080-101108-1 | 1 |
| MOTHER BOARD (DC-101) | 1181-000238-11 | 7 |
| PC BOARD (MC-31007A6) | 1181-000228-15 (16) | 5 |
| PC BOARD (MC-31008A) | 1181-000229-17 | 4 |
| PC BOARD MC-31009A(M-340) | 1181-000231-15 | 5 |
| GAUGE PORT(PG-18-C) | 118500064211 | 1 |
| VACUUM GAUGE CONTRILLER | 1101(0240005701) | 1 |
| FIXING SCREW(M3 QUARTZ) | 1110-409874-11 | 10 |
| ROLLER | 111030458311 | 2 |
| PCB (MC-31023) | 118100018211 | 1 |
| BELT T/M(037-XL-151E-F) | 2102-420115-1 | 1 |
| PCB ASS'Y (MOTOR DRIVER MDIF-01A-1) | 1181-000303-15 (0003031-F) | 2 |
| PCB ASS'Y | 1181-000310-13 | 1 |
| PCB DC-402B | 118100028713 | 1 |
| PCB DC-901A | 118100012812 | 1 |
| PCB MC-2025A (DDC-9900) | 118100050311 | 20 |
| PCB MC-31041A (DI) | 118100025413 (TS-4000 | 4 |
| PCB MC-31043A(TS-4000Z) | 118100025715 | 1 |
| PCB MC-31044A (TS-4000Z) | 118100016111 | 1 |
| PCB MC-31045A (TS-4000Z) | 118100025615 | 1 |
| PCB MC-31086 (DDC-9900) | 118702144311 | 5 |
| TIMING BELT | 166XL037G | 11 |
| FB RELAY1 W/TRF 1+5M | 1187-026490-11 | 1 |
| THETA RELAY1 W/TRF 1+5M | 1187-026485-11 | 1 |
| FUSE(CR2LS-30) | 045-000154-1 | 3 |
| FUSE(EF-E1) | 045-100968-1 | 5 |
| FUSE(EF-E10) | 045-100966-1 | 5 |
| FUSE(EF-E2) | 045-200969-1 | 5 |
| FUSE(EF-E3) | 045-300970-1 | 5 |
| CABLE ASSY | 1187-006969-15 | 2 |
| DC FAN(109P0424H302) | 040-000150-1 | 2 |
| STEPPING MOTOR (LIFTER) | 103-7501-6044 | 7 |
| STEPPING MOTOR(A3549-9215HGE) | 040-000294 | 2 |
| STEPPING MOTOR(UPH568-A) | 040-569109-1 | 2 |
| PRESSURE CONTROLLER | 152E-PO-10FEET | 1 |
| VALVE END MFC BOX(MM281352) | 118702758613 | 1 |
| CYLINDER OFF/UP | 1102-300042-14 | 1 |
| FAN | 125XR-0182 | 2 |
| WAFER COUNTER.LB | 118100001714 | 1 |
| PCB ASS'Y | 2181-020031-13 (-16) | 1 |
| PCB ASS'Y | 2181-020045-11 | 1 |
| O-RING VITON | 122-850 | 32 |
| BOARD CP-8280 | 118100007711 | 6 |
| SHUTTER STOPPER | 1110-402152-1 | 24 |
| GUIDE FOR X-AXIS 805 | 111041019912 | 1 |
| GUIDE | 111040997411 | 6 |
| GEAR HEAD | 2GA 18K | 3 |
| GEAR HEAD | 2GA.30K | 1 |
| I/O COUNTER 4 BOARD | 481-501620-2 | 6 |
| OPRATION S/W RAMP BOARD | 481-601632-1 | 5 |
| REVERSIBLE MOTOR | 4RK25GN-A | 2 |
| BEARING | 7206A | 10 |
| O-RING VITON | 33-3800575 | 4 |
| MAGNETIC SENSOR | D-F79VW | 5 |
| PROXIMITY SENSOR | D-G79 | 4 |
| PUSHER'S COMB(1) | 410-315621-3 | 7 |
| ELEVATOR CPU BOARD | CPU-88-64K-C | 1 |
| PRESSURE S/W | CB14-A01-3.5KG | 1 |
| ELEVATOR DRIVER BOARD | ELV1 | 1 |
| FITTING | CK-1/8-PK-4 | 25 |
| O-RING VITON | 5VP0002 | 2 |
| O-RING VITON | 50R0100 | 9 |
| O-RING VITON | 50R0111850 | 12 |
| O-RING VITON | 50R0095 | 12 |
| BELT | ME2079671B | 1 |
| BELT | MT4049380A | 11 |
| SCREW(INCNEL600) | MJ4-085200-13 | 8 |
| GAS REGULATOR | TORR-50LU6A(7KG/CM2) | 2 |
| REGULATOR | TORR-50RU 6A | 2 |
| REGULATOR | TORR 50WAVE | 3 |
| GAUGE HEADS | TR211-DN16KF(CAT.NO 157-85-V | 4 |
| LIMIT SWITCH | SHL-W2155 | 22 |
| SUB WAFER COUNTER | LM0000250A(118100021417) | 1 |
| SUS RING | KF5D-3065-003S0 | 5 |
| TIMING PULLY SHAFT | KF5D-2031-089S0 | 2 |
| WAFER FORK | KFUD-3092-006C2 | 18 |
| MFM | SIH4 1SLM FM-860-4V-TC | 1 |
| 803 WORM REDUCTION GEAR(HANDLER) | MT40478 | 1 |
| KF SEAL | NW63(34.211.806) | 10 |
| TEFLON SPACER-PTFE | MX3025090D | 1 |
| O-RING VITON | PIE20 | 3 |
| FLEXIBLE TUBE | ORV-50B-10 | 1 |
| FLOW METER | P-600-2UA-H-SW/ZL | 2 |
| SCR | PDT1504 | 5 |
| STECKVERSCHR | QSM-M5-4 | 102 |
| PC BOARD(M-120) | MC-31010A | 1 |
| CONNECTOR(220-R-6-10-F) | 0280039881 | 4 |