| < CVD AMAT > | ||
| Description | Part Number | Qty |
| PRESSURE SWITCH 2PSI | 0150-09093 | 3 |
| EXPANDED VME | 0240-70089 | 1 |
| ISOLATOR 3700-09885 | 0020-09885 | 31 |
| SUSCEPTOR (0010-60005) | 0010-09134 | 1 |
| CRYO REGENERATION VALVE | 05-82506-00 | 1 |
| MICROPROCESSOR TEMP.CONTROLLER | 306904 | 1 |
| VALVE BUTTERFLY THRO | 3870-02311 | 3 |
| O-RING CHEMREZ | 9255-SC520 | 1 |
| O-RING KALREZ | G-240 | 2 |
| S/W DISKETTE | REV 1.5.8 | 2 |
| SEAL RING | 3-05-006 | 5 |
| AIR VALVE | PS2-4167-000 | 1 |
| ROBOT BLADE 8" | 0010-76005 | 1 |
| SBC SYNERGY BOARD V21 /SV21 | 0090-76110 | 5 |
| SBC SYNERGY BOARD V440 | 0090-76109 | 2 |
| SBC SYNERGY BOARD V452 | 0090-76133 | 1 |
| D-I/O BOARD | 0100-20003 | 1 |
| A-I/O BOARD | 0100-76124 | 1 |
| OMS BOARD | 0190-76005 | 1 |
| SEI BOARD | 0100-20001 | 1 |
| VGA VIDEO BOARD | 0190-76050 | 1 |