| < DRY ETCH LAM > | ||
| Description | Part Number | Qty |
| QUARTZ LINNER | 716-32339-002 (716-051923-001) | 1 |
| BEARING | 746-01088-001 | 14 |
| SPRING COMPRESSION | 754-03352-001 | 7 |
| LM 55 TIMER | 631-00385-001 | 81 |
| MATRIX CRT DRIVER PCB (USED) | 810-01984-001 | 1 |
| FEED THRU CAPACITOR.01UF | 688-01100-001 | 10 |
| MOTOR DRIVER PCB | 810-08380-002(810-009281-001) | 2 |
| SINGLE DRIVE MOTOR ASS'Y | 853-04094-001 | 2 |
| PRESSURE SWITCH | 768-00748-001 | 19 |
| FILTER | 772-009188-001 | 2 |
| ASS'Y MANIFOLD & VALVE ENT | 853-01341-002 | 1 |
| VALVE PRESSURE RELIEF | 796-550586-001 | 1 |
| O-RING VITON | 734-002013-001 | 9 |
| O-RING VITON | 734-001082-001 | 46 |
| REAL WINDOW (O-RING VITION | 734-005186-001 | 9 |
| O-RING VITON | 734-000690-001 | 47 |
| O-RING VITON | 734-003091-001 | 6 |
| TRANSISTOR PNP MJE 700 | 626-0580-01 | 89 |
| VACUUM CHUCK | 715-00410-001 | 2 |
| INDEXER INTERFACE ASS'Y | 810-11365-001 | 3 |
| MOUNT SCREW | 715-00058-002 | 24 |
| ANODE(8") | 715-04042-001 | 1 |
| ASSY CA RF MATCH | 853-017908-101 | 1 |
| ASSY I/O HARNESS | 853-004156-001 | 5 |
| BASE MOUNTING GATE LINKAGE | 715-07939-001 | 5 |
| BASE MOUNTING GATE LINKAGE | 715-07939-002 | 14 |
| BUSHING LARGE POLY EMIDE | 713-00032-001 | 23 |
| CABLE ID ROM ADAPTER | 853-006103-001 | 5 |
| CABLE MANOMETER | 853-07719-001 | 5 |
| BUSHING 3/8 FNPT*1/2 MNPT | 921-04152-001 | 10 |
| DRIVE ROLLER | 715-03985-001 | 4 |
| PLUG SMCONE TOUCH | 920-008479-002 | 1 |
| GATE STOP (AIR LOCK) | 713-00130-001 | 14 |
| HET EDGE RING | 716-140139-101 | 1 |
| PIVOT ARM | 715-06160-001 | 7 |
| PLATE SHIELD ENTRANCE | 714-06381-001 | 1 |
| PLATE SHIELD EXIT | 714-06381-002 | 3 |
| QUARTZ LINNER지지대 | 715-330394-001 | 1 |
| SCR FL HDV4-20UNC-2A*1/2LG | 720-01013-008 | 120 |
| SHAFT | 752-00149-001 | 3 |
| SHC 4-40 7/15 LG | 720-00920-007 | 50 |
| SHCS(NO4)112-40*1/4 LG | 720-00908-006 | 87 |
| UPPER PLATE | 715-00018-002 | 12 |
| WAFER HOLDER 6" | 715-02624-001 | 2 |
| WAFER HOLDER 6" | 715-02624-002 | 2 |
| GPIB-PCII/IIA | I/O INTERFACE CARD | 2 |
| CENTER FOCUS RING | KF2E-3771-023AO | 5 |
| LAM ANODE(A) | KF2E-3771-021AO-1 | 1 |
| SEAL RETAINER | 715-00832-001 | 10 |
| BEARING RADIAL TRTAINER | 746-06597-001 | 11 |
| O-RING VITON | 734-000228-001 | 7 |
| REACTION CHAMBER | 715-000043-001 | 1 |
| LONG'S MFG | 715-30079-1-1 | 5 |
| PLUG GAP GAUGE | 713-010221-003 | 4 |
| BASE GAP GAUGE | 713-010222-003 | 4 |
| TOOL,DOMED ELECTRODE LEVELING | 515-011835-001 | 1 |
| FLOWMETRE VETICAL PORT | 771-06781-026 | 7 |
| ASSY, THERMOCOUPLE | 853-53545-001 | 1 |
| VAC SWITCH | 853-57124-001 | 1 |