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DRY ETCH HITACHI > |
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| Description |
Part Number |
Qty |
| SOLENOID VALVE |
2-812739-A |
1 |
| NUT AN 04 |
11-1-10 |
50 |
| BELLOW
FLANGE |
2-813358-A |
2 |
| BELLOW
FLANGE |
2-814358-A |
1 |
| GROUNDED
ELECTRODE |
2-813658-A |
4 |
| PENNING
GAUGE SENSOR |
2-812829-C |
1 |
| UNLOAD
LINEAR ARM |
3-821221-A |
1 |
| PENNING
GAUGE CONTROLLER |
2-812829-B |
1 |
| BEARING
GV1 |
3-820397-12 |
2 |
| BELLOW
FLANGE |
3-819728-A |
1 |
| RELAY |
2-323784-7 |
2 |
| HEATER |
2-816006-A/B |
1 |
| STEPPING
MOTOR |
2-813312-A |
2 |
| PRESSURE
SWITCH |
2-807931-B |
2 |
| PIRANI
GAUGE METER |
2-812828-A |
1 |
| GV1
CYLINDER |
3-823438-1 |
2 |
| L-TYPE
VALVE |
3-822287-A |
2 |
| SOLENOID
VALVE |
2-812731-A |
2 |
| SOLENOID
VALVE |
2-812732-A |
2 |
| SOLENOID
VALVE |
2-812733-B |
2 |
| SOLENOID
VALVE |
2-812738-A |
2 |
| O-RING
VITON |
3-827667-3 |
4 |
| O-RING
VITON |
3-827674-8 |
3 |
| O-RING
VITON |
3-827674-15 |
3 |
| O-RING
TEFLON |
3-815069 |
10 |
| O-RING
VITON |
3-829223-8 |
3 |
| O-RING
VITON |
3-827667-12 |
10 |
| O-RING
VITON |
3-827667-18 |
4 |
| O-RING
VITON |
3-827673-5 |
4 |
| O-RING
VITON |
3-827676-12 |
5 |
| O-RING
VITON |
3-829223-5 |
2 |
| O-RING
VITON |
3-829223-6 |
4 |
| AIR
CYLINDER |
2-812513-C |
2 |
| AIR
CYLINDER |
2-812513-D |
2 |
| AIR
CYLINDER |
2-822595-A |
2 |
| AIR
PRESSURE S/W |
2-806321-C |
2 |
| WAFER
PLATE |
2-812500-B |
2 |
| SCREW |
3-829303-7 |
40 |
| SCREW |
3-829304-3 |
40 |
| SCREW |
3-830268-5 |
40 |
| SOLENOID
VALVE |
3-817929-A |
3 |
| SPRING |
3-823394-A |
12 |
| WAFER
SUPPORT |
3-828845-B |
2 |
| AIR
CYLINDER (LINER ARM) |
3122-812513-C+D |
1 |
| CYLINDER |
CMK2-TB-02-120 |
1 |
| O-RING |
V-225 |
2 |
| CIRCUIT
B/D SBC09-2 |
S-22 |
2 |
| CIRCUIT
BD AI16-2 |
S-26 |
1 |
| ARM |
2-812265-B |
1 |
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